武丽云,纪刚强.基于相位调制的光声传感器灵敏度分析与应用[J].包装工程,2025,(5):173-180.
WU Liyun,JI Gangqiang.Sensitivity Analysis and Application of Optical Acoustic Sensors Based on Phase Modulation[J].Packaging Engineering,2025,(5):173-180. |
| 基于相位调制的光声传感器灵敏度分析与应用 |
| Sensitivity Analysis and Application of Optical Acoustic Sensors Based on Phase Modulation |
| 投稿时间：2024-12-02 |
| DOI：10.19554/j.cnki.1001-3563.2025.05.022 |
| 中文关键词: 相位调制系统 高Q值全固态 法布里-珀罗谐振腔 高灵敏度 |
| 英文关键词: phase modulation system high-Q all-solid-state Fabry-Pérot cavity high sensitivity |
| 基金项目:山西省基础研究计划(自由探索类)青年科技研究基金(202403021222298);山西省高等学校科技创新计划(2023L344);山西省教育科学“十四五”规划2023年度教育数字化与教育教学改革研究专项课题(SZH-230070);太原工业学院引进人才科研资助项目(2023KJ059) |
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| 中文摘要: |
| 目的 采用高Q值全固态法布里-珀罗(Fabry-Pérot，F-P)谐振腔为声传感器敏感单元，设计高灵敏度、抗电磁干扰的光学声传感器，广泛应用于自动化陶瓷生产过程中的无损检测。方法 高Q值全固态F-P谐振腔的声敏感结构，光与声直接相互作用，可以实现高灵敏度、高信噪比的声信号检测;设计相位调制声信号检测系统，分析声传感器灵敏度的影响因素。结果 从理论上分析相位调制方式对光纤F-P腔声传感器灵敏度的影响，制备高Q值全固态F-P腔光学声传感器，搭建相位调制系统，实现高灵敏度光学声传感器的声信号检测。结论 谐振腔的Q值、相位解调系统锁定位置等都会影响声传感器的灵敏度;开发的相位调制解调系统，光纤F-P腔声传感器性能分析方法以及对光纤F-P腔声信号的数值分析结果，可为陶瓷加工过程无损检测提供有用的指导。 |
| 英文摘要: |
| The work aims to adopt a high-Q all-solid-state Fabry-Perot (F-P) resonator as the sensitive unit of the acoustic sensor to design an optical acoustic sensor with high sensitivity and electromagnetic interference resistance, and widely use it in non-destructive testing during the automated ceramic production process. The acoustic sensitive structure of the high-Q all-solid-state F-P resonator enables direct interaction between light and sound, achieving high sensitivity and high signal-to-noise ratio in acoustic signal detection. A phase modulation acoustic signal detection system was designed, and the influencing factors of the acoustic sensor's sensitivity were analyzed. The influence of the phase modulation method on the sensitivity of the fiber F-P cavity acoustic sensor was theoretically analyzed. A high-Q all-solid-state F-P cavity optical acoustic sensor was fabricated, and a phase modulation system was built to realize the detection of acoustic signals with high sensitivity. In conclusion, the Q value of the resonator and the locking position of the phase demodulation system can affect the sensitivity of the acoustic sensor. The development of phase modulation and demodulation systems, the performance analysis method of the fiber F-P cavity acoustic sensor, and the numerical analysis results of the fiber F-P cavity acoustic signal can provide useful guidance for non-destructive testing in the ceramic processing process. |
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