SE电池电极制造过程中的硅片表面粗糙度对蜡滴铺展的影响

章珍霞; 张逸新

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SE电池电极制造过程中的硅片表面粗糙度对蜡滴铺展的影响
章珍霞, 张逸新
江南大学，无锡 214122

摘要:

建立了蜡滴铺展系数与多晶硅片表面粗糙度的准则关系式，运用最小二乘法数据拟合方法得出了蜡滴铺展系数与相关参数的实验关系式。该实验关系式揭示了喷蜡蜡滴在多晶硅片上的铺展直径与多晶硅片表面粗糙度间的函数关系。

关键词: 喷蜡印刷多晶硅片粗糙度铺展系数

DOI：

分类号:TS851+.2; TS802.2

基金项目:

Influence of Polysilicon Surface Roughness on Wax Drop Spreading in Electrode Production Process of SE Batteries

ZHANG Zhen-xia, ZHANG Yi-xin

Jiangnan University, Wuxi 214122, China

Abstract:

The criterion equation of wax drop spreading coefficient and surface roughness of polycrystalline silicon was established. The least square method was applied to fit the empirical formula of wax drop spreading coefficient and related parameters. The empirical formula can be used for predicting the largest spread diameter of wax drop on the polysilicon.

Key words: spray wax printing polysilicon roughness spreading coefficient